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Fabrication of nanostructures using atomic‐force‐microscope‐based lithography

 

作者: L. L. Sohn,   R. L. Willett,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 67, issue 11  

页码: 1552-1554

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.114731

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We describe a novel technique for fabricating metallic nanostructures on an arbitrary substrate using an atomic force microscope (AFM). An AFM is used to plow a pattern through the top of two resist layers spun onto a substrate. The resist is then developed to create a mask through which material can be deposited. By changing the applied force, the top resist‐layer thickness, or the development time, the linewidth can be varied. Continuous metallic wires ∼500 A˚×400 A˚×15 &mgr;m have been fabricated on bare substrates and between contact pads. ©1995 American Institute of Physics.

 

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