Optical Low‐Coherence Reflectometry for Nondestructive Process Measurements
作者:
Summer Lockerbie Randall,
Anatol M. Brodsky,
Lloyd W. Burgess,
Robert L. Green,
期刊:
AIP Conference Proceedings
(AIP Available online 1903)
卷期:
Volume 657,
issue 1
页码: 1713-1720
ISSN:0094-243X
年代: 1903
DOI:10.1063/1.1570336
出版商: AIP
数据来源: AIP
摘要:
Optical Low‐Coherence Reflectometry (OLCR) is a white‐light interference technique which can be used as a sensor in a number of processing applications. Research at the Center for Process Analytical Chemistry focuses on analysis of both transparent and highly‐scattering materials. OLCR has been applied to monitor the thickness of polymer films and clear coatings on scattering matrices. Additional process applications include fermentation monitoring and non‐invasive thickness determination of highly scattering coatings on both conducting and non‐conducting substrates. © 2003 American Institute of Physics
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