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Optical Low‐Coherence Reflectometry for Nondestructive Process Measurements

 

作者: Summer Lockerbie Randall,   Anatol M. Brodsky,   Lloyd W. Burgess,   Robert L. Green,  

 

期刊: AIP Conference Proceedings  (AIP Available online 1903)
卷期: Volume 657, issue 1  

页码: 1713-1720

 

ISSN:0094-243X

 

年代: 1903

 

DOI:10.1063/1.1570336

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Optical Low‐Coherence Reflectometry (OLCR) is a white‐light interference technique which can be used as a sensor in a number of processing applications. Research at the Center for Process Analytical Chemistry focuses on analysis of both transparent and highly‐scattering materials. OLCR has been applied to monitor the thickness of polymer films and clear coatings on scattering matrices. Additional process applications include fermentation monitoring and non‐invasive thickness determination of highly scattering coatings on both conducting and non‐conducting substrates. © 2003 American Institute of Physics

 

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