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A structure marker study for Pd2Si formation: Pd moves in epitaxial Pd2Si

 

作者: C.‐D. Lien,   M‐A. Nicolet,   C. S. Pai,  

 

期刊: Journal of Applied Physics  （AIP Available online 1985）
卷期: Volume 57, issue 2  

页码: 224-226

 

ISSN:0021-8979

 

年代: 1985

 

DOI:10.1063/1.334792

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A sample with the configuration Si (111)/single crystalline Pd2Si/polycrystalline Pd2Si/Pd is used to study the dominant moving species during subsequent Pd2Si formation by annealing at 275 °C. The interface between monocrystalline and polycrystalline Pd2Si is used as a marker to monitor the dominant moving species. The result shows that Pd is the dominant moving species in the monocrystal. off

 

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