Solid state surface charge sensor
作者:
K. G. Vosburgh,
J. F. Schenck,
期刊:
Review of Scientific Instruments
(AIP Available online 1976)
卷期:
Volume 47,
issue 8
页码: 972-972
ISSN:0034-6748
年代: 1976
DOI:10.1063/1.1134785
出版商: AIP
数据来源: AIP
摘要:
Measurements with a novel solid state sensor show the ability to detect surface charge densities smaller than 0.1 nC/cm2with an inherent spatial resolution of less than 50 &mgr;. Surface contact is not required, and the sensing process is nondestructive. These devices may be constructed in arrays using present day semiconductor processing technology.
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