Quality improvement of chemical-mechanical wafer planarization process in semiconductor manufacturing using a combined generalized linear modelling - non-linear programming approach

 

作者: Shu-KaiS. Fan,  

 

期刊: International Journal of Production Research  （Taylor Available online 2000）
卷期: Volume 38, issue 13  

页码: 3011-3029

 

ISSN:0020-7543

 

年代: 2000

 

DOI:10.1080/00207540050117413

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

 

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