Polymeric thin films were prepared from gaseous titanium tetraisopropoxide by low‐temperature plasma polymerization. The films exhibitedn‐type semiconductor properties and showed conductivities in the range between 10−8–102s/cm. High photocurrent under irradiation of 30 mW/cm2of visible light was observed which exceeded the value found for plasma‐polymerized copper acetylacetonate thin films by nearly three orders of magnitude. From x‐ray photoelectron spectroscopy analysis, it was found that the films largely consist of metallic and organic layers corresponding to TiOx(0<x<2) and (CH2)n, respectively. Transmission electron micrograph observations and electron diffraction measurements made it possible to conclude that the film has a specific texture consisting of amorphous metal layers with an average thickness of 15–25 nm inside a polymer matrix.