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Generation of surface gratings with periods < 1000 A˚

 

作者: L. F. Johnson,   K. A. Ingersoll,  

 

期刊: Applied Physics Letters  （AIP Available online 1981）
卷期: Volume 38, issue 7  

页码: 532-534

 

ISSN:0003-6951

 

年代: 1981

 

DOI:10.1063/1.92441

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Simple techniques for doubling the spatial frequency of surface‐relief gratings are demonstrated. Grating periods as small as 750 A˚ have been produced and further subdivision appears possible.

 

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