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Ballistic electron emission microscopy and spectroscopy of Au/GaAs interfaces

 

作者: W. J. Kaiser,   L. D. Bell,   M. H. Hecht,   F. J. Grunthaner,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1989)
卷期: Volume 7, issue 4  

页码: 945-949

 

ISSN:0734-211X

 

年代: 1989

 

DOI:10.1116/1.584585

 

出版商: American Vacuum Society

 

关键词: GOLD;GALLIUM ARSENIDES;INTERFACES;ELECTRONIC STRUCTURE;INTERFACE STRUCTURE;SCHOTTKY BARRIER DIODES;EMISSION SPECTROSCOPY;MOLECULAR BEAM EPITAXY;ELECTRON SPECTROSCOPY;GaAs

 

数据来源: AIP

 

摘要:

The Au/GaAs interface is currently the subject of much investigation. However, a complete understanding of this interface, and the ability to precisely control Au/GaAs interface properties, is still lacking. Previous work has focused primarily on interfaces prepared on the GaAs(110) cleaved surface and on the chemically or thermally prepared GaAs(100) surface. This paper presents the first Schottky barrier results for the Au/GaAs(100) interface prepared completelyinsituon GaAs grown by molecular‐beam epitaxy. The resulting interface displays unexpected properties which can be interpreted in terms of enhanced electrode interdiffusion. In addition, the capability of molecular‐beam epitaxy forinsituprocessing enables the stabilization of this interface against diffusion, and allows the formation of a Au/GaAs system with nearly ideal properties. Newly developed ballistic electron spectroscopy and imaging techniques demonstrate that the heterogeneity present at the interface of Au/GaAs(100) fabricated on chemically treated GaAs substrates is removed.

 

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