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Laser annealing of silicon

 

作者: John M. Poate,   Walter L. Brown,  

 

期刊: Physics Today  （AIP Available online 1982）
卷期: Volume 35, issue 6  

页码: 24-30

 

ISSN:0031-9228

 

年代: 1982

 

DOI:10.1063/1.2915125

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Silicon is one of the best understood of all materials because it lies at the heart of one of the central technologies of the twentieth century: integrated circuits. How much more can we learn about silicon and ways of handling it? Quite a lot, apparently, if the remarkable developments in laser annealing over the past five years are any indication.

 

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