An application of the Boltzmann transport equation to ion range and damage distributions in multilayered targets
作者:
L. A. Christel,
J. F. Gibbons,
S. Mylroie,
期刊:
Journal of Applied Physics
(AIP Available online 1980)
卷期:
Volume 51,
issue 12
页码: 6176-6182
ISSN:0021-8979
年代: 1980
DOI:10.1063/1.327650
出版商: AIP
数据来源: AIP
摘要:
A method for the direct calculation of primary ion and recoil range distributions, as well as energy deposition profiles in multilayered targets, is presented. The technique is based on stepwise numerical integration of the Boltzmann transport equation. Range distributions for arsenic, phosphorus, and boron and damage density distributions resulting from antimony and boron implants in silicon are found to compare favorably with other calculations and experimental results. Oxygen recoil fluxes from SiO2into Si also agree well with experiment. Silicon and nitrogen recoil range distributions resulting from a 400‐keV selenium implantation through 1000 A˚ of Si3N4on GaAs are calculated and are shown to have a significant effect on doping profiles determined from electrical measurements.
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