Self-organization duringSi1−yCyalloy layer growth on Si(001) using homogeneous coevaporation
作者:
H. J. Osten,
E. Bugiel,
P. Zaumseil,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 82,
issue 1
页码: 231-235
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.365862
出版商: AIP
数据来源: AIP
摘要:
We show that the formation of self-organized pseudosuperlattices during homogeneous epitaxial growth ofSi1−yCyon Si(001) is a fundamental phenomenon not limited to special growth techniques. For samples grown at higher temperatures, and therefore, with higher concentration of nonsubstitutional carbon, we find contrast variations in cross-sectional transmission electron microscopy, roughly periodic in the growth direction in epitaxialSi1−yCyalloy layers. The periodicity is a monotonic function of growth temperature and growth rate. Although the final explanation of this phenomenon remains an open question, we are able to rule out several possible effects. These structures do not reflect a modulation in the substitutional C content, the formation of the C-richSinCphases, or the segregation of nonsubstitutional C-containing defect complexes up to a certain saturation level. Rather, we show that the layers formed during the different growth processes contain different amounts of carbon. There is no critical size of the C-containing defect complexes independent of growth conditions that could lead to the formation of the observed structures. The variation of the periodicity with growth rate and temperature is similar to surface diffusion processes with an activation energy of 0.94±0.04 eV, close to the value for Si adatom diffusion on a Si(001) surface. ©1997 American Institute of Physics.
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