Specific contact resistance measurements of ohmic contacts to semiconducting diamond
作者:
C. A. Hewett,
M. J. Taylor,
J. R. Zeidler,
M. W. Geis,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 77,
issue 2
页码: 755-760
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.358996
出版商: AIP
数据来源: AIP
摘要:
A simplified version of the specific contact resistance measurement scheme of G. K. Reeves [Solid State Electronics23, 487 (1980)] has been developed. Its applicability to semiconducting diamond is demonstrated using four sample types: epitaxial films doped to mid 1019acceptors/cm3on 〈100〉 and 〈110〉 type IIa substrates; type IIb diamonds 0.25 mm thick, and type IIb diamonds thinned to 0.035–0.05 mm thick. The ohmic contacts were based on a solid‐state annealing process using carbide forming metals. The measured specific contact resistance depends mainly on the doping level in the diamond. Measured values ranged from 8×10−6&OHgr; cm2for heavily doped films to 1×10−2&OHgr; cm2for lightly doped bulk samples. A simple analysis shows that the contacts to highly doped layers are suitable for device applications. ©1995 American Institute of Physics.
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