Conductance resonance of tunneling structure with a few Au clusters, deposited on an insulating film, is studied by the generalized Breit–Wigner formula in a tight‐binding approximation. We find that in the conductance resonance the multiple peak structure may come from the interaction between supported Au clusters on an insulating film and the different arrangements of Au clusters may cause difference of the conductance resonance peaks. The experimental observation of multiple peak structure can be explained by generalizing our model to the system of a few quantum dots. Therefore, it is possible to predict the effect of interaction between metal clusters on the conductance resonance and develop some new microelectronic devices by artificially arranging metal clusters onto the surface of the insulating film. ©1995 American Institute of Physics.