Review of SrBi2Ta2O9thin films capacitor processing
作者:
Christine Dehm,
Walter Hartner,
Günther Schindler,
Renate Bergmann,
Barbara Hasler,
Igor Kasko,
Marcus Kastner,
Manuela Schiele,
Volker Weinrich,
Carlos Mazuré,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1999)
卷期:
Volume 26,
issue 1-4
页码: 197-213
ISSN:1058-4587
年代: 1999
DOI:10.1080/10584589908215622
出版商: Taylor & Francis Group
关键词: Ferroelectric thin films;MOD;stacked capacitor;SrBi2Ta2O9;SBT
数据来源: Taylor
摘要:
Ferroelectric memories (FeRAMs) are new types of memories especially suitable for mobile applications due to their unique properties like non-volatility, small DRAM-like cell size, fast read and write as well as low voltage/low power behavior. Although standard CMOS processes can be used for frontend and backend processes, FeRAM technology development has to overcome major challenges due to new materials used for capacitor formation. This work gives an overview of SrBi2Ta2O9(SBT) thin films capacitor processing using Pt as electrode material. The study describes in detail SBT formation using metal organic deposition (MOD) as well as influence of electrode thickness and capacitor patterning on SBT electrical properties. Also, results for integration of the capacitor process into a 0.5μm CMOS process with 2-layer tungsten/aluminum metallization as well as stacked capacitor results are given.
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