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Low‐energy ion extraction with small dispersion from an electron cyclotron resonance microwave plasma stream

 

作者: Morito Matsuoka,   Ken’ichi Ono,  

 

期刊: Applied Physics Letters  (AIP Available online 1987)
卷期: Volume 50, issue 26  

页码: 1864-1866

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.97719

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The effects of a magnetic field gradient on the energy profiles of ions extracted from an electron cyclotron resonance (ECR) microwave plasma stream are studied. The mean energy and energy dispersion of the ions strongly depend on the spatial distribution of the magnetic field strength. Ions with an energy dispersion of several eV are extracted from the plasma by the mirror field gradient application. Consequently, the magnetic field gradient, i.e., the magnetic flux profile, is one of the most important parameters in ECR microwave plasma processes.

 

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