Inductive reactances and excess capacitances at WNx/n‐GaAs Schottky gate contacts
作者:
Klaus Steiner,
Naotaka Uchitomi,
Nobuyuki Toyoda,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1990)
卷期:
Volume 8,
issue 5
页码: 1113-1116
ISSN:0734-211X
年代: 1990
DOI:10.1116/1.584926
出版商: American Vacuum Society
关键词: TUNGSTEN NITRIDES;GALLIUM ARSENIDES;SCHOTTKY BARRIER DIODES;MINORITY CARRIERS;DIFFUSION;CAPACITANCE;FREQUENCY DEPENDENCE;LOW TEMPERATURE;MEDIUM TEMPERATURE;WNx;GaAs;REACTANCE
数据来源: AIP
摘要:
Minority carrier injection at forward‐biased WNx/n‐GaAs Schottky gates lead to diffusion capacitances in excess to the space charge capacitance and inductive reactances in certain frequency ranges.p‐buffer layers act as a minority carrier sink which enhances the minority carrier injection. This finally gives stronger excess capacitances and inductive reactances. Furthermore, excess diffusion capacitances can be observed at higher frequencies. The frequency dependent admittance behavior of forward biased WNx/n‐GaAs gates is studied in the temperature range between 77 K and room temperature.
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