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Inductive reactances and excess capacitances at WNx/n‐GaAs Schottky gate contacts

 

作者: Klaus Steiner,   Naotaka Uchitomi,   Nobuyuki Toyoda,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1990)
卷期: Volume 8, issue 5  

页码: 1113-1116

 

ISSN:0734-211X

 

年代: 1990

 

DOI:10.1116/1.584926

 

出版商: American Vacuum Society

 

关键词: TUNGSTEN NITRIDES;GALLIUM ARSENIDES;SCHOTTKY BARRIER DIODES;MINORITY CARRIERS;DIFFUSION;CAPACITANCE;FREQUENCY DEPENDENCE;LOW TEMPERATURE;MEDIUM TEMPERATURE;WNx;GaAs;REACTANCE

 

数据来源: AIP

 

摘要:

Minority carrier injection at forward‐biased WNx/n‐GaAs Schottky gates lead to diffusion capacitances in excess to the space charge capacitance and inductive reactances in certain frequency ranges.p‐buffer layers act as a minority carrier sink which enhances the minority carrier injection. This finally gives stronger excess capacitances and inductive reactances. Furthermore, excess diffusion capacitances can be observed at higher frequencies. The frequency dependent admittance behavior of forward biased WNx/n‐GaAs gates is studied in the temperature range between 77 K and room temperature.

 

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