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Retractable capillary doser

 

作者: G. L. Fowler,   J. A. Panitz,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1984)
卷期: Volume 55, issue 9  

页码: 1507-1508

 

ISSN:0034-6748

 

年代: 1984

 

DOI:10.1063/1.1137971

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A retractable capillary doser is described which can place a reproducible coverage of molecules on a substrate in an ultrahigh‐vacuum environment. An integral valve assembly controls the flow of molecules from the doser volume to the substrate. Automatic operation is achieved by controlling the valve and the position of the doser orifice from a commercial IEEE interface.

 

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