Scanning laser acoustic microscope with digital data acquisition
作者:
E. P. Rudd,
R. K. Mueller,
W. P. Robbins,
T. Skaar,
B. Soumekh,
Z. Q. Zhou,
期刊:
Review of Scientific Instruments
(AIP Available online 1987)
卷期:
Volume 58,
issue 1
页码: 45-53
ISSN:0034-6748
年代: 1987
DOI:10.1063/1.1139565
出版商: AIP
数据来源: AIP
摘要:
A scanning laser acoustic microscope (SLAM) is described. The SLAM achieves a resolution of about 10 &mgr;m and is capable of imaging subsurface features at depths up to several millimeters, using appropriate reconstruction algorithms. The various components of the apparatus, both acousto‐optical and electronic, are described. A major feature of the SLAM is a digital data‐acquisition system capable of storing and processing the complex acoustic field in images with 256×256‐pixel resolution. An array processor enables most floating‐point operations to be completed in a few seconds. Examples of acoustic images obtained from a test sample are presented.
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