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Sputtering of Chemisorbed Nitrogen withAr+

 

作者: Harold F. Winters,  

 

期刊: Journal of Vacuum Science and Technology  (AIP Available online 1971)
卷期: Volume 8, issue 1  

页码: 17-21

 

ISSN:0022-5355

 

年代: 1971

 

DOI:10.1116/1.1316280

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

Flash filament techniques and mass spectrometry have been used to make sputtering measurements for nitrogen which is chemisorbed on a tungsten surface and bombarded withAr+ions. The sputtering rate for a given energy between 20 eV and 300 eV is described by the equationdN/dt=−S(N/)N0)ni,whereNis the surface coverage,N0the saturation surface coverage,nithe ion flux, andSthe sputtering ratio measured at saturation. The sputtering ratio for nitrogen was found to be ∼0.02 at 17 eV, indicating a low threshold energy for sputtering of the strongly bound nitrogen atom. This result suggests that the well-known experimental relationship between sublimation energy (∼7 eV/nitrogen atom) and threshold energy may not hold for chemisorbed gases. For all energies between 100 and 300 eV the measured sputtering ratio for nitrogen was approximately twice that found for tungsten from atomically clean tungsten. This is particularly surprising when one considers that nitrogen covers less than 20% of the geometrical surface area. This result may, indicate a large sputtering ratio even for gases with large binding energies.

 

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