Superconducting YBa2Cu3O7−xthick films have been growninsituon polycrystalline CaO stabilized ZrO2substrates by radio frequency thermal plasma chemical vapor deposition at ∼0.1 &mgr;m/min. Mixed aqueous nitrate solutions of yttrium, barium, and copper were used as precursors. Different substrate temperatures of 450, 500, and 600 °C were used for deposition. The as‐deposited films were black, dense, smooth, and superconducting with onsetTc’s higher than 80 K. X‐ray diffraction shows that the films were highly textured with thecaxis normal to the substrate. Energy dispersive x‐ray spectroscopy was used to analyze the film composition. From direct current magnetization measurements, the critical current density was found to be 1 × 106A/cm2at 10 K and zero field for a film deposited at 450 °C.