We have successfully fabricated epitaxially grown YBa2Cu3O7/PrBa2Cu3O7(YBCO/PBCO) multilayer thin films on SrTiO3and LaAlO3substrates by dc/rf magnetron sputtering. The thicknesses of YBCO and PBCO varied from 1 to 8 unit cells. Satellite peaks in x‐ray diffraction patterns clearly indicate the formation of periodic modulation structures of different wavelengths. At a certain thickness of the YBCO layer, the zero resistance transition temperatureTc0decreased with the increase of the PBCO layer thickness. In contrast,Tc0increased with the increase of the YBCO layer thickness at a constant PBCO layer thickness.