首页   按字顺浏览 期刊浏览 卷期浏览 Low‐temperature organometallic vapor phase epitaxial growth of CdTe using a new ...
Low‐temperature organometallic vapor phase epitaxial growth of CdTe using a new organotellurium source

 

作者: D. W. Kisker,   M. L. Steigerwald,   T. Y. Kometani,   K. S. Jeffers,  

 

期刊: Applied Physics Letters  (AIP Available online 1987)
卷期: Volume 50, issue 23  

页码: 1681-1683

 

ISSN:0003-6951

 

年代: 1987

 

DOI:10.1063/1.97766

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The growth of CdTe by organometallic vapor phase epitaxy has been accomplished at 250 °C, using a new tellurium source, dimethylditelluride. The compound decomposes at a much lower temperature than the corresponding monotelluride, apparently by reacting with a cadmium‐containing species to eliminate one tellurium atom. As a result, the temperature necessary for deposition of CdTe has been lowered from the range of 400 °C, thus making completely thermally driven chemical vapor deposition of II‐VI compounds possible at much lower temperatures.

 

点击下载:  PDF (296KB)



返 回