Thin films of Pb(Zr,Ti)O3have been fabricated on fused quartz or stainless steel substrates by an electron beam evaporation technique. The quality of the PZT films is examined by the x‐ray diffraction technique. Observation of theD‐Ehysteresis loop has shown the films to be ferroelectric. Dielectric anomaly of the film on a stainless steel substrate has been observed around 340 °C.