Ferroelectric memory programs in Canada
作者:
Michael Sayer,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1992)
卷期:
Volume 1,
issue 2-4
页码: 151-159
ISSN:1058-4587
年代: 1992
DOI:10.1080/10584589208215708
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
Thin film PZT ferroelectrics have been fabricated in Canada since 1976 by magnetron sputtering and more recently by acetate-based sol gel processing and are now being considered for implementation into commercial communications systems. Processing based on rapid thermal annealing has shown marked advantages for crystallization into the required perovskite phase. Applications based on the piezoelectric properties of PZT films are shown to have an interesting potential for a range of devices.
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