An easily constructed device is described that ensures deformation‐free electrolytic etching of thin (&mgr;m range) specimens and avoids elaborate and time‐consuming procedures. Essentially the device consists of a perforated electrode on which the specimen is held by maintaining a low pressure underneath. In addition the description of a valve assembly is given which is used for the recycling of the electrolyte that is sucked out of the bath through the holes in the electrode.