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Molecular‐beam epitaxial growth mechanisms on the GaAs(100) surface

 

作者: James P. Harbison,   Helen H. Farrell,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1988)
卷期: Volume 6, issue 2  

页码: 733-735

 

ISSN:0734-211X

 

年代: 1988

 

DOI:10.1116/1.584360

 

出版商: American Vacuum Society

 

关键词: DIMERS;ROUGHNESS;MOLECULAR BEAM EPITAXY;RHEED;III−V SEMICONDUCTORS;FILM GROWTH;EPITAXIAL LAYERS;VACANCIES;GALLIUM ARSENIDES;SURFACE RECONSTRUCTION;SURFACE STATES;GaAs

 

数据来源: AIP

 

摘要:

We propose a mechanism for molecular‐beam epitaxial growth on GaAs(100) and other III–V(100) surfaces which includes a detailed description of the changes in surface reconstructions throughout the growth cycle. We have previously used the electronic stability criterion which requires all arsenic dangling bonds to be filled and all gallium dangling bonds to be empty to successfully predict static surface reconstructions of III–V surfaces. In the work presented here, we use these same criteria to predict electronically stable intermediates during the growth cycle which are characterized by surface dimers and dimer vacancies. The resulting model proposes specific reconstructed electronically stable intermediates during the complete growth cycle. The model explains the retention of the (2×4) overall reconstruction throughout the cycle, provides at least one mechanism for the cyclical roughness variations observed via reflection high‐energy electron diffraction oscillations, and pinpoints certain rate limiting configurations in the process which should lead to further fruitful experimental investigations.

 

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