Piezoelectric arrays suitable for high frequency ultrasound have been fabricated using PZT sol gel composite coatings in the thickness range of 5–100μm on aluminum and platinized alumina substrates. The coatings have been quantitatively characterized using impedance measurements to 100 MHz. The analysis provides a direct measure of the piezoelectric coupling coefficient of kt< 0.34. 16 element linear array structures suitable for ultrasound biomicroscopy at 30–40 MHz with elements having dimensions ∼40μm thick, 20–25μm wide and 15μm spacing have been patterned using excimer based laser micromachining. The dielectric and pulse echo responses have been measured.