Microstructural investigation of acetate-derived PLZT films
作者:
K.D. Preston,
G.H. Haertling,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1992)
卷期:
Volume 1,
issue 1
页码: 89-98
ISSN:1058-4587
年代: 1992
DOI:10.1080/10584589208215567
出版商: Taylor & Francis Group
关键词: PLZT films;microstructure;acetate precursor method;SEM;film characterization
数据来源: Taylor
摘要:
The behavior of thin films in the PLZT system made using a recently developed metal acetate precursor technique was investigated with respect to microstructural and crystallographic development. Variations in film microstructure and phase continuity were dependent on substrate and film composition. The optical quality of Zr rich films deposited onto sapphire substrates was impaired by the formation of a pyrochlore phase leading to a discontinuous microstructure. Application of a PLT buffer layer was shown to significantly modify this situation, improving the potential viability of this fabrication method.
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