Fabrication of aspheric high numerical aperture reflective diffractive optic elements using electron beam lithography
作者:
D. Mikolas,
R. Bojko,
H. G. Craighead,
F. Haas,
D. A. Honey,
H. F. Bare,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1994)
卷期:
Volume 12,
issue 1
页码: 20-25
ISSN:1071-1023
年代: 1994
DOI:10.1116/1.587185
出版商: American Vacuum Society
关键词: OPTICAL SYSTEMS;FABRICATION;DIFFRACTION;FOCUSING;REFLECTION;LITHOGRAPHY;ETCHING;ELECTRON BEAMS;ION BEAMS;ABERRATIONS;SILICON;GOLD
数据来源: AIP
摘要:
Electron beam lithography and reactive ion etching have been used to fabricate four level aspheric reflecting focusing diffractive optical elements. A fast (f/2), 1 mm diam, four‐phase‐level, reflecting, off‐axis imaging diffractive optical element, without spherical aberration, coma, and astigmatism, has been fabricated on silicon. Alignment and stitching errors have been held to less than 40 nm and the smallest pattern feature is 0.6 μm. The silicon grating is coated with gold to enhance reflectivity with an efficiency of 73%. The quality of diffractive optical elements is limited by the fidelity of the fabrication steps, and methods are demonstrated for proximity effect correction, alignment, high selectivity mask creation, and reactive ion etching that can be used for high quality diffractive optic element fabrication of essentially arbitrary type.
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