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Theory of ripple topography inhibition in depth profiling with sample rocking

 

作者: G. Carter,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 21  

页码: 3066-3068

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119438

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A theory is developed which explains how sample rocking during ion beam sputtering erosion can inhibit ripple formation, observed with monodirectional ion incidence, on radiation amorphisable materials. The model assumes curvature dependent sputtering yield and random ion arrival and sputtering as roughening processes and radiation mediated viscous flow and ballistically driven effective surface diffusion as smoothing processes. ©1997 American Institute of Physics.

 

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