作者: G. Carter,
期刊: Applied Physics Letters (AIP Available online 1997) 卷期: Volume 71, issue 21
页码: 3066-3068
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119438
出版商: AIP
数据来源: AIP
摘要:
A theory is developed which explains how sample rocking during ion beam sputtering erosion can inhibit ripple formation, observed with monodirectional ion incidence, on radiation amorphisable materials. The model assumes curvature dependent sputtering yield and random ion arrival and sputtering as roughening processes and radiation mediated viscous flow and ballistically driven effective surface diffusion as smoothing processes. ©1997 American Institute of Physics.
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