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Observation of cryopump fluorescence during operation of electron‐beam evaporator

 

作者: R. A. Erck,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  （AIP Available online 1994）
卷期: Volume 12, issue 5  

页码: 2931-2932

 

ISSN:0734-2101

 

年代: 1994

 

DOI:10.1116/1.578968

 

出版商: American Vacuum Society

 

关键词: CRYOPUMPS;ELECTRON BEAMS;EVAPORATION;FLUORESCENCE;KEV RANGE 01−10;ARGON IONS;WATER VAPOR

 

数据来源: AIP

 

摘要:

A blue‐green glow was observed in the cold‐plate section of a conventional cryogenic pump used in a vacuum‐deposition chamber. The fluorescence is associated with operation of an electron‐beam evaporator and is present at all gas pressures and evaporator voltages used, but cannot be made to occur during operation of a 1 kV Kaufman‐type ion source or a 3 kV electron source.  

 

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