首页   按字顺浏览 期刊浏览 卷期浏览 Oxygen adsorbed on GaAs(110) surfaces: The effect of temperature on band bending
Oxygen adsorbed on GaAs(110) surfaces: The effect of temperature on band bending

 

作者: K. Stiles,   D. Mao,   A. Kahn,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  (AIP Available online 1988)
卷期: Volume 6, issue 4  

页码: 1170-1173

 

ISSN:0734-211X

 

年代: 1988

 

DOI:10.1116/1.584273

 

出版商: American Vacuum Society

 

关键词: ADSORPTION;SURFACE STATES;IMPURITY STATES;SORPTIVE PROPERTIES;OXYGEN;GALLIUM ARSENIDES;ACCEPTORS;DEEP ENERGY LEVELS;TEMPERATURE EFFECTS;OXIDATION;CRYSTAL DEFECTS;LOW TEMPERATURE;GaAs

 

数据来源: AIP

 

摘要:

GaAs surfaces cleaved in ultrahigh vacuum and cooled to 100 K [low temperature (LT)] were exposed to molecular oxygen. Band bending as a function of exposure was measured with ultraviolet photoemission spectroscopy. Band bending on LTp‐GaAs is very small up to exposures>106L, whereas the same exposures give considerable band bending at room temperature (RT). Band bending on LTn‐GaAs is as fast as at RT. This situation is therefore opposite to that of metals/LT GaAs reported last year at this conference, but is analogous to that produced by Cl/GaAs at RT. These results can be interpreted in terms of simple adsorption of electronegative species which introduce an acceptor level deep in the GaAs gap. As for metals on LT GaAs, the nature of the surface states induced by the adsorption of single species dominates the position ofEFat low coverage. Metallicity dominates at high coverages of metals; oxidation‐induced defects dominate at RT or at higher exposures for O2/GaAs.

 

点击下载:  PDF (419KB)



返 回