A fast pulsed capillary discharge device has been developed and implemented. The device combines the features of a transient hollow cathode discharge with the inherent characteristics of the capillary discharge, to obtain VUV to XUV radiation with ns rise time. The discharge operates in a 0.8 mm inner diameter alumina capillary, at 10–30 kV applied voltage. On axis discharge initiation is assisted by electron beams, which are characteristic of the hollow cathode effect. A short, 5 ns full width at half maximum XUV pulse is produced in association with a ∼1 kA, 5 ns current pulse. ©1998 American Institute of Physics.