首页   按字顺浏览 期刊浏览 卷期浏览 Beam diagnostic techniques for a small‐size high‐efficiency radio‐...
Beam diagnostic techniques for a small‐size high‐efficiency radio‐frequency ion source

 

作者: S. G. Zakhary,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1995)
卷期: Volume 66, issue 12  

页码: 5419-5422

 

ISSN:0034-6748

 

年代: 1995

 

DOI:10.1063/1.1146062

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The use of both a small discharge volume and magnetic mirror fields allow sequential ionization and an increased efficiency of this ion source. The extracted ion current can reach 12 mA at an extraction voltage=3 kV and discharge pressure=20 mTorr. In this paper a description of the techniques which are used for measuring the important parameters to evaluate this ion source is presented. These parameters are: beam profile, beam emittance, energy spread, and charge spectra of the beam. The source is found to have a beam emittance of 150 mm m rad, and energy spread of 30–60 eV, and a content of Ar+4reaching &bartil;20% of the total extracted ion current. ©1995 American Institute of Physics.

 

点击下载:  PDF (352KB)



返 回