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Measurement of Contrast Changes in Scanning Electron Microscopy

 

作者: E. M. Schulson,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1973）
卷期: Volume 44, issue 3  

页码: 348-349

 

ISSN:0034-6748

 

年代: 1973

 

DOI:10.1063/1.1686134

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A direct and rapid method is described for measuring changes in contrast on SEM images. The method is based on the fact that a given level of contrast can be detected only if the beam current at the specimen exceeds a critical value.

 

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