Thin films of ZnTe and Cd1−xZnxTe (x<0.5) have been deposited by the direct combination of the elements on the surface of W/graphite, ceramic, and glass substrates at 550–600 °C in a hydrogen or helium atmosphere. Their microstructure, crystallographic, optical, and electrical properties were studied. Because of the greater stability of ZnTe than CdTe, the Zn/Cd molar ratio in Cd1−xZnxTe films is always less than that in the gas phase. The optical band gap of ZnTe has been determined to be 2.25 eV and that of Cd1−xZnxTe is a linear function of the composition. Preliminary work on Cd1−xZnxTe /CdS heterojunctions has also been carried out.