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The recrystallization of ion implanted silicon layers. I. Pb-Ion implanted si

 

作者: J.S. Williams,   C.E. Christodoulides,   W.A. Grant,   R. Andrew,   J.R. Brawn,   M. Booth,  

 

期刊: Radiation Effects  (Taylor Available online 1977)
卷期: Volume 32, issue 1-2  

页码: 55-66

 

ISSN:0033-7579

 

年代: 1977

 

DOI:10.1080/00337577708237457

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Rutherford backscattering (RBS) and transmission electron microscopy (TEM) have been employed to investigate the annealing behaviour of Pb-implanted Si layers. The dose dependence of the post-anneal, residual disorder has been examined in considerable detail. Results indicate that the ability for the implanted Si layer to reorder as a single crystal decreases with increasing Pb concentration contained within the amorphous surface layers. The reordered Si layer is completely polycrystalline for Pb concentrations greater than a few atomic percent and the formation of this polycrystalline structure during annealing is accompanied by substantial Pb outdiffusion. Our observations lead us to suggest a step-by-step representation for Si recrystallization, where the reordered structure is dependent upon the local Pb concentration encountered as the regrowth process progresses from the bulk towards the Si suface.

 

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