The short-pulse laser crystallization and interference structuring of amorphous germanium films were investigated by time resolved reflection measurements and Raman spectroscopy. We demonstrate that submicrometer crystalline structures with very sharp lateral interfaces can be produced by laser interference crystallization of nonhydrogenated samples. In hydrogenated films, on the other hand, the film surface disrupts upon laser exposure leading to the formation of a free-standing crystalline membrane. The Raman spectra of laser crystallized germanium display effects of finite crystallite size and stress. ©1997 American Institute of Physics.