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1 Gb/s Si high quantum efficiency monolithically integrable &lgr;=0.88 &mgr;m detector

 

作者: B. F. Levine,   J. D. Wynn,   F. P. Klemens,   G. Sarusi,  

 

期刊: Applied Physics Letters  （AIP Available online 1995）
卷期: Volume 66, issue 22  

页码: 2984-2986

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.114251

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We propose and demonstrate a 1 Gb/s high quantum efficiency Si MSM metal‐semiconductor‐metal detector which is complementary metal‐oxide semiconductor compatible. The detector absorbs over 50% of the light entering the active layer at a wavelength of &lgr;=0.88 &mgr;m. ©1995 American Institute of Physics.

 

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