Focused ion-beam fabrication of fiber probes with well-defined apertures for use in near-field scanning optical microscopy
作者:
Saeed Pilevar,
Klaus Edinger,
Walid Atia,
Igor Smolyaninov,
Christopher Davis,
期刊:
Applied Physics Letters
(AIP Available online 1998)
卷期:
Volume 72,
issue 24
页码: 3133-3135
ISSN:0003-6951
年代: 1998
DOI:10.1063/1.121570
出版商: AIP
数据来源: AIP
摘要:
We present a focused ion-beam (FIB) fabrication method for very clean and well-defined subwavelength fiber probes with metallic apertures of a desired diameter for use in near-field scanning optical microscopy. Such probes exhibit improved features compared to probes coated with metal by the conventional angled evaporation technique. Examples of FIB fabricated fiber probes are shown and images of a test sample are presented using one of the probes in a near-field microscope. ©1998 American Institute of Physics.
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