FeGe liquid metal ion source for maskless isolation implants in InP
作者:
C. H. Chu,
D. L. Barr,
L. R. Harriott,
H. H. Wade,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 4
页码: 1273-1276
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.585899
出版商: American Vacuum Society
关键词: ION SOURCES;ION IMPLANTATION;INDIUM PHOSPHIDES;IRON ALLOYS;GERMANIUM ALLOYS;GERMANIUM IONS;IRON IONS;LIQUID METALS;ANNEALING;ELECTRIC CONDUCTIVITY;HYSTERESIS;BINARY ALLOYS;(Fe,Ge);InP
数据来源: AIP
摘要:
A Fe–Ge alloy was used to fabricate a liquid metal ion source (LMIS) for our focused ion beam system. The iron ion and germanium ions can be utilized to create semi‐insulating regions for device isolation andn‐type doping in InP. The properties of the Fe–Ge LMIS were characterized by measuring the ion current‐extraction voltage characteristics, the mass spectrum of the ion species in the ion beam, and the stability of the source current. The changes of resistivity in InP before and after Fe++implant and after thermal annealing were measured in mesa‐etched four‐terminal test structures. The resistivity of as‐implanted samples increases about four orders of magnitude compared with original resistivity. After rapid thermal annealing at 400 °C for 10 s, the resistivity is about two times larger than that of as‐implanted sample.
点击下载:
PDF
(318KB)
返 回