Using microchannels to improve the performance of vacuum technology instrumentation
作者:
G. F. Vanderschmidt,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 3
页码: 2001-2006
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577443
出版商: American Vacuum Society
关键词: VACUUM SYSTEMS;MICROCHANNEL ELECTRON MULTIPLIERS;LEAK DETECTORS;LEAK TESTING;ELECTRON BEAMS;ION BEAMS;USES
数据来源: AIP
摘要:
Many instruments used in vacuum technology for the measurement and diagnosis of the gas content of systems use electrons and ions directed by electric and magnetic fields. Examples include mass spectrometer leak detectors, residual gas analyzers, and ion gauge tubes. Microchannel technology, originally developed to implement night vision devices for the military, can be used to make beams of electrons and ions visible. This technology is very useful in the development and improvement of devices that depend on the electric and magnetic optics to form and guide such beams. The development of a new tube for a leak detector provides a good example of the application of this technology. The basic structure of microchannel devices requires special vacuum enclosures and electrical circuitry; some examples used in the development of the new tube are presented, along with photographs of ion beam images. The images demonstrate a previously unrecognized focusing phenomenon, a good example of the utility of the approach.
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