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Laser‐Machining Thin‐Film Electrode Arrays on Quartz Crystal Substrates

 

作者: J. L. Hokanson,   B. A. Unger,  

 

期刊: Journal of Applied Physics  (AIP Available online 1969)
卷期: Volume 40, issue 8  

页码: 3157-3160

 

ISSN:0021-8979

 

年代: 1969

 

DOI:10.1063/1.1658158

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The feasibility of laser‐machining quartz crystal resonators for frequency and inter‐resonator coupling adjustment has been demonstrated. The inter‐resonator coupling has been adjusted by altering the geometry of the electrode array. The frequency has been adjusted by vaporizing material to form an array of holes on the electrode surface. The results indicate that extremely fine adjustments of inter‐resonator coupling and resonator frequency can be achieved. Frequency adjustments greater than one part in 108have been demonstrated. No degradation of the crystal unit electrical parameters could be detected as a result of the machining process. Furthermore, laser trimming lends itself to automated processing without the need for elaborate vacuum equipment as is presently required with some adjustment techniques. Laser trimming also appears to be ideally suited for adjustment of high‐frequency resonators where fine tolerances are required.

 

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