Preparation of YBa2Cu3O7−xsuperconducting thin films over large area substrates
作者:
Hui Zhang,
Zhijian Sun,
Senzu Yang,
Zhengming Ji,
Peiheng Wu,
Shiyuan Zhang,
Hongchai Zhang,
Yin Hang,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1993)
卷期:
Volume 11,
issue 2
页码: 390-393
ISSN:0734-2101
年代: 1993
DOI:10.1116/1.578740
出版商: American Vacuum Society
关键词: SUPERCONDUCTING FILMS;HIGH−TC SUPERCONDUCTORS;YTTRIUM OXIDES;BARIUM OXIDES;COPPER OXIDES;CRITICAL CURRENT;TRANSITION TEMPERATURE;QUATERNARY COMPOUNDS;YBa2Cu3O7
数据来源: AIP
摘要:
Using facing targets and off‐axis direct‐current magnetron sputtering, we have prepared high quality YBa2Cu3O7−x(YBCO) superconducting thin films on ZrO2(100) withTc≤90 K (R=0) andJcas high as 1.6×106A/cm2(78 K, zero magnetic field) over an area of 70 mm diameter. Over this large area, the fluctuations ofTcand film thickness are from less than +0.9% to −1.3% and from +6.3% to −10%, respectively. In this article, also discussed are the differences between two sputtering modes used in our experiments, one of which gives larger area of superconducting thin film, higher deposition rate, and better thickness uniformity than the other. It is found that the smoothness and the temperature uniformity of the substrate holder are a of extreme importance for the fabrication of large area superconducting thin films. An electroquartz with little deformation during deposition has turned out to be very successful as the substrate holder in our fabrication.
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