Infrared response from metallic particles embedded in a single‐crystal Si matrix: The layered internal photoemission sensor
作者:
R. W. Fathauer,
J. M. Iannelli,
C. W. Nieh,
Shin Hashimoto,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 57,
issue 14
页码: 1419-1421
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.103453
出版商: AIP
数据来源: AIP
摘要:
Infrared radiation at wavelengths of 1–2 &mgr;m has been detected in a new device labeled the layered internal photoemission sensor. The device structure, which is grown by molecular beam epitaxy, incorporates epitaxial CoSi2particles with dimensions of 10–50 nm. Radiation absorbed by these particles photoexcites carriers into a surrounding single‐crystal silicon matrix. A peak quantum efficiency of 1.3% is measured, which is approximately six times higher than in planar CoSi2Schottky diodes with 5 nm silicide thickness.
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