Selective removal of a Si0.7Ge0.3layer from Si(100)
作者:
A. H. Krist,
D. J. Godbey,
N. P. Green,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 58,
issue 17
页码: 1899-1901
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.105067
出版商: AIP
数据来源: AIP
摘要:
The selective removal of epitaxial Si0.7Ge0.3from {100} silicon using an aqueous based etch is reported. An etch consisting of HNO3:H2O:HF(0.5%), 40:20:5 at 22 °C, removes Si0.7Ge0.3at a rate of 207 A˚/min, and removes {100} Si at a rate of 16 A˚/min. This corresponds to a selectivity of 1321 where the selectivity is defined as the ratio of the Si0.7Ge0.3to {100} Si etch rates. This etch leaves the surface smooth and free from pitting or trenching as observed by optical microscopy. The results obtained are consistent with a germanium enhanced oxidation mechanism of the Si0.7Ge0.3alloy during semiconductor removal.
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