Emission characteristics of TiN-coated silicon field emitter arrays
作者:
Seung-Youl Kang,
Jin Ho Lee,
Yoon-Ho Song,
Yuon Tae Kim,
Kyoung Ik Cho,
Hyung Joun Yoo,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1998)
卷期:
Volume 16,
issue 2
页码: 871-874
ISSN:1071-1023
年代: 1998
DOI:10.1116/1.590222
出版商: American Vacuum Society
关键词: TiN;Si
数据来源: AIP
摘要:
We observed the emission characteristics and stability of TiN-coated Si field emitter arrays (FEAs) with a TiW gate structure. The TiN layer on Si tips was formed by a two-step rapid thermal nitridation process in anNH3ambient by which a Ti layer was thermally converted to aTiN/ TiSi2bilayer. This process could suppress the formation ofTiO2 on the surface and make the TiN layer thicker than a one-step process. By coating Si tips with TiN, the operating voltage of the TiN-coated Si FEAs was reduced by about 20 V compared with non-coated ones. Also, the TiN-coated Si FEAs showed thermally stable electron emission compared with non-coated ones.
点击下载:
PDF
(160KB)
返 回