首页   按字顺浏览 期刊浏览 卷期浏览 Surface solidification and impurity segregation in amorphous silicon
Surface solidification and impurity segregation in amorphous silicon

 

作者: P. S. Peercy,   J. M. Poate,   Michael O. Thompson,   J. Y. Tsao,  

 

期刊: Applied Physics Letters  (AIP Available online 1986)
卷期: Volume 48, issue 24  

页码: 1651-1653

 

ISSN:0003-6951

 

年代: 1986

 

DOI:10.1063/1.96843

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Real‐time measurements of the melt and solidification dynamics during pulsed laser irradiation have permitted elucidation of the processes which lead to the formation of very thin (∼2 nm) buried impurity layers in amorphous silicon. These novel structures are found to result from interfacial segregation at two moving liquid silicon‐amorphous silicon interfaces—one propagating toward the surface and the other propagating from the surface inward. The velocities of these interfaces are found to be remarkably low, ranging from 1 to 8 m/s for melts of <20 ns duration.

 

点击下载:  PDF (254KB)



返 回