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Textured diamond films growth on (100) silicon via electron-assisted hot filament chemical vapor deposition

 

作者: G. S. Fu,   X. H. Wang,   W. Yu,   L. Han,   L. F. Dong,   X. W. Li,  

 

期刊: Applied Physics Letters  （AIP Available online 1997）
卷期: Volume 70, issue 15  

页码: 1965-1967

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.118793

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Textured (100) diamond films are successfully grown on single-crystalline (100) silicon substrate by electron assisted hot filament chemical vapor deposition from a gas mixture of methane and hydrogen. The effects of various parameters have been studied. The optimal growth conditions are obtained and the oriental growth character is discussed. ©1997 American Institute of Physics.

 

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