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A study of octupoles as correctors

 

作者: Zhifeng Shao,   Vernon Beck,   A. V. Crewe,  

 

期刊: Journal of Applied Physics  (AIP Available online 1988)
卷期: Volume 64, issue 4  

页码: 1646-1651

 

ISSN:0021-8979

 

年代: 1988

 

DOI:10.1063/1.341784

 

出版商: AIP

 

数据来源: AIP

 

摘要:

In an electron microscope equipped with sextupole correctors the ultimate resolution is limited by the fifth‐order spherical aberration of the optical system used to form the electron probe. We have examined the possibilities of using octupoles in order to correct this fifth‐order spherical aberration. We find that for an electrostatic octupole, the fifth‐order aberration is symmetric, while for a magnetic octupole the fifth‐order aberration is asymmetric but it is possible to reduce this asymmetry by properly arranging the initial conditions. Based on these results, we propose a system which could be used to correct fifth‐order aberration in a probe forming system equipped with a sextupole corrector.

 

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